2025/08/11 by Hirokazu Fujiwara, Fujiwara, Hirokazu, Yuki Itoya +7
Engineering · Materials Science · #Applied Physics (physics.app-ph) #Electronic and Structural Properties of Oxides #FOS: Physical sciences #Ferroelectric and Negative Capacitance Devices #Ferroelectric and Piezoelectric Materials #Materials Science (cond-mat.mtrl-sci)
paper · pdf · doi:10.48550/arxiv.2508.07698
openalex publication_date 2025/08/11 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
We have developed an operando laser-based photoemission electron microscope (laser-PEEM) with a ferroelectric characterization system. A Sawyer-Tower circuit was implemented to measure the polarization-voltage (P-V) characteristics of ferroelectric devices. Using this system, we successfully obtained the well-defined P-V hysteresis loops for a ferroelectric capacitor incorporating Hf0.5Zr0.5O2 (HZO), reproducing the typical field-cycling characteristics of HZO capacitors. After dielectric breakdown caused by field-cycling stress, we visualized a conduction filament through the top electrode without any destructive processing. Additionally, we successfully observed polarization contrast through the top electrode of an oxide semiconductor (InZnOx). These results indicate that our operando laser-PEEM system is a powerful tool for visualizing conduction filaments after dielectric breakdown, the ferroelectric polarization contrasts, and electronic state distribution of materials implemented in ferroelectric devices, including ferroelectric field-effect transistors and ferroelectric tunnel junctions.