1980/01/01 by G. D. Danilatos · 29 citations
Materials Science · Engineering · Physics and Astronomy · #Electron and X-Ray Spectroscopy Techniques #Photocathodes and Microchannel Plates #X-ray Spectroscopy and Fluorescence Analysis #Scanning electron microscope #Electron beam-induced deposition #Optics #Aperture (computer memory) #Microscope #Environmental scanning electron microscope #Conventional transmission electron microscope #Electron #Electron microscope #Detector #Materials science #Atmospheric pressure #Cathode ray #Limiting #Low-voltage electron microscope #Scanning transmission electron microscopy #Physics
paper · doi:10.1002/sca.4950030314
published in Scanning 3(3), 215-217 (Wiley)
openalex publication_date 1980/01/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/23
Abstract A new detection configuration for the Scanning Electron Microscope (SEM) has been devised, which allows the imaging of the surfaces of a specimen in the open room, i.e., at atmospheric pressure. Such a device gives rise to a new microscope: the Atmospheric Scanning Electron Microscope (ASEM). In this configuration, a backscattered electron detector is placed between the pressure limiting aperture and the electron column. The electron beam passes through the final aperture, reaches the sample in the open room and the backscattered electrons passing through the same final aperture reach the detector. This principle has been tested and the result reported.