2012/09/05 by Ruby dela Torre, Joseph Larkin, Alon Singer +1 · 1 citation
Engineering · #Nanopore and Nanochannel Transport Studies #Ion-surface interactions and analysis #Fuel Cells and Related Materials #Materials science #Characterization (materials science) #Nanopore #Solid-state #Nanopore sequencing #Throughput #Fabrication #Nanotechnology #DNA sequencing #DNA #Engineering physics #Genetics #Computer science #Biology #Engineering #Telecommunications #Wireless
paper · doi:10.1088/0957-4484/23/38/385308
openalex publication_date 2012/09/05 · openalex created_date 2016/06/24 · openalex updated_date 2026/08/01
We report the fabrication and characterization of uniformly sized nanopore arrays, integrated into an optical detection system for high-throughput DNA sequencing applications. Nanopore arrays were fabricated using focused ion beam milling, followed by TiO(2) coating using atomic layer deposition. The TiO(2) layer decreases the initial pore diameter down to the sub-10 nm range, compatible with the requirements for nanopore-based sequencing using optical readout. We find that the TiO(2) layers produce a lower photoluminescence background as compared with the more widely used Al(2)O(3) coatings. The functionality of the nanopore array was demonstrated by the simultaneous optical detection of DNA-quantum dot conjugates, which were electro-kinetically driven through the nanopores. Our optical scheme employs total internal reflection fluorescence microscopy to illuminate a wide area of the TiO(2)-coated membrane. A highly parallel system for observing DNA capture events in a uniformly sized 6 × 6 nanopore array was experimentally realized.