2010/12/29 by Igal Bayn, Bayn, Igal, B. Meyler +28
Engineering · Materials Science · Physics and Astronomy · #Advanced Surface Polishing Techniques #Diamond and Carbon-based Materials Research #FOS: Physical sciences #Integrated Circuits and Semiconductor Failure Analysis #Laser Material Processing Techniques #Optics (physics.optics) #physics.optics
paper · pdf · doi:10.48550/arxiv.1012.5878
25 pages, 9 figures
arxiv created 2010/12/29 · openalex publication_date 2010/12/29 · arxiv updated 2010/12/30 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
The realization of photonic crystals (PC) in diamond is of major importance for the entire field of spintronics based on fluorescent centers in diamond. The processing steps for the case of diamond differ from those commonly used, due to the extreme chemical and mechanical properties of this material. The present work summarizes the state of the art in the realization of PC's in diamond. It is based on the creation of a free standing diamond membrane into which the desired nano-sized patterns are milled by the use of Focused-Ion-Beam (FIB). The optimal fabrication-oriented structure parameters are predicted by simulations. The milling strategies, the method of formation the diamond membrane, recipes for dielectric material-manipulation in FIB and optical characterization constraints are discussed in conjunction with their implication on PC cavity design. The thus produced structures are characterized via confocal photoluminescence.