Machine-learning-assisted growth of high-quality AlN single-crystal thin films via MNVPE based on Bayesian optimization

2026/07/14 by Tengyu Zhang, Hui Zhang, Yifan Li +7
Physics and Astronomy · Materials Science · Engineering · #GaN-based semiconductor devices and materials #Machine Learning in Materials Science #Acoustic Wave Resonator Technologies

paper · doi:10.1016/j.jcrysgro.2026.128760