2026/01/12 by Dwi Prananto, Yifei Wang, Yuta Kainuma +3 · 1 voice
Biochemistry, Genetics and Molecular Biology · Materials Science · Physics and Astronomy · #Advanced Electron Microscopy Techniques and Applications #Diamond #Diamond and Carbon-based Materials Research #Fabrication #Focused ion beam #Force Microscopy Techniques and Applications #Magnetometer #Nanometre #Nanoscopic scale #Pillar #Scanning probe microscopy #Ultrapure water #cond-mat.mtrl-sci
paper · pdf · doi:10.35848/1347-4065/ae7f5f
published in Japanese Journal of Applied Physics 65(13), 130904 (Institute of Physics)
arxiv published 2026/01/12 · openalex publication_date 2026/06/18 · openalex created_date 2026/06/19 · arxiv updated 2026/06/29 · openalex updated_date 2026/07/28
Abstract Scanning diamond nitrogen-vacancy probe microscopy (SNVM) is an important tool for studying nanoscale condensed-matter phenomena. Ga + -ion-focused-ion-beam (FIB) milling has been introduced as a method for fabricating SNVM, while the probe diameter is limited to a few micrometers due to Ga + -induced damage. We report a method for improving the quality of FIB-fabricated SNVM probes by polyvinyl alcohol and Pt/Pd capping, followed by post-fabrication UV/ozone exposure. The effectiveness of the method is confirmed by the fabrication of an 800 nm diameter probe with shallow NV centers, demonstrating an imaging of maze-like magnetic domain structure with a resolution of a few hundred nanometers and an improved sensitivity of 6.7 μT/Hz −1/2 , while preserving spin coherence properties.