Compatibility of 3-D printed devices in cleanroom environments for semiconductor processing

2018/09/05 by Toni P. Pasanen, T.P. Pasanen, G. von Gastrow +9 · 1 citation
Engineering · #3D Printing in Biomedical Research #Additive Manufacturing and 3D Printing Technologies #Modular Robots and Swarm Intelligence

paper · doi:10.1016/j.mssp.2018.08.027

openalex publication_date 2018/09/05 · crossref created 2018/09/05 · crossref issued 2019/01/01 · crossref published 2019/01/01 · crossref published-print 2019/01/01 · crossref deposited 2020/05/20 · openalex created_date 2025/10/10 · crossref indexed 2026/07/02 · openalex updated_date 2026/08/01

Citations

• Open-Source Syringe Pump Library
• Open-Source 3-D Platform for Low-Cost Scientific Instrument Ecosystem
• Open source laboratory sample rotator mixer and shaker
• Open Source 3-D Printed Nutating Mixer
• An open-source, programmable pneumatic setup for operation and automated control of single- and multi-layer microfluidic devices
• Controller for microfluidic large-scale integration

Cited by

• Chemical compatibility of fused filament fabrication-based 3-D printed components with solutions commonly used in semiconductor wet processing
• Cleanroom [wikipedia]