2012/12/17 by Arman Hajati, Dimitre Latev, Deane Gardner +4 · 2 citations
Engineering · #Acoustic Wave Resonator Technologies #Advanced MEMS and NEMS Technologies #Ultrasonics and Acoustic Wave Propagation
paper · doi:10.1063/1.4772469
openalex publication_date 2012/12/17 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/15
Here we present the design and experimental acoustic test data for an ultrasound transducer technology based on a combination of micromachined dome-shaped piezoelectric resonators arranged in a flexible architecture. Our high performance niobium-doped lead zirconate titanate film is implemented in three-dimensional dome-shaped structures, which form the basic resonating cells. Adjustable frequency response is realized by mixing these basic cells and modifying their dimensions by lithography. Improved characteristics such as high sensitivity, adjustable wide-bandwidth frequency response, low transmit voltage compatible with ordinary integrated circuitry, low electrical impedance well matched to coaxial cabling, and intrinsic acoustic impedance match to water are demonstrated.