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3-dimensional electrode patterning within a microfluidic channel using metal ion implantation

2010/01/01 by Jae‐Woo Choi, Samuel Rosset, Muhamed Niklaus +3 · 1 citation
Engineering · #Microfluidic and Capillary Electrophoresis Applications #Microfluidic and Bio-sensing Technologies #Electrowetting and Microfluidic Technologies

paper · doi:10.1039/b917719a

openalex publication_date 2010/01/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

The application of electrical fields within a microfluidic channel enables many forms of manipulation necessary for lab-on-a-chip devices. Patterning electrodes inside the microfluidic channel generally requires multi-step optical lithography. Here, we utilize an ion-implantation process to pattern 3D electrodes within a fluidic channel made of polydimethylsiloxane (PDMS). Electrode structuring within the channel is achieved by ion implantation at a 40 degrees angle with a metal shadow mask. The advantages of three-dimensional structuring of electrodes within a fluidic channel over traditional planar electrode designs are discussed. Two possible applications are presented: asymmetric particles can be aligned in any of the three axial dimensions with electro-orientation; colloidal focusing and concentration within a fluidic channel can be achieved through dielectrophoresis. Demonstrations are shown with E. coli, a rod shaped bacteria, and indicate the potential that ion-implanted microfluidic channels have for manipulations in the context of lab-on-a-chip devices.

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