2015/05/21 by M. H. Bitarafan, Hugh Ramp, H. Ramp +9 · 24 citations
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #Atomic physics #Cantilever #Characterization (materials science) #Chip #Composite material #Delamination (geology) #Fabry–Pérot interferometer #Finesse #Materials science #Mechanical and Optical Resonators #Optics #Optoelectronics #Optomechanics #Photonic and Optical Devices #Physics #Q factor #Resonance (particle physics) #Resonator #Stack (abstract data type) #Thermal #Wavelength #cond-mat.mes-hall #physics.optics
paper · pdf · doi:10.1364/josab.32.001214
published in Journal of the Optical Society of America B 32(6), 1214 (Optica Publishing Group) · \c{opyright} 2015 Optical Society of America. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited
openalex publication_date 2015/05/21 · arxiv created 2015/10/27 · arxiv updated 2015/11/30 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/05
We report on the thermomechanical and thermal tuning properties of curved-mirror Fabry–Perot resonators, fabricated by the guided assembly of circular delamination buckles within a multilayer a-Si/SiO2 stack. Analytical models for temperature dependence, effective spring constants, and mechanical mode frequencies are described and shown to be in good agreement with experimental results. The cavities exhibit mode volumes as small as ∼10λ3, reflectance-limited finesse ∼3×103, and mechanical resonance frequencies in the MHz range. Monolithic cavity arrays of this type might be of interest for applications in sensing, cavity quantum electrodynamics, and optomechanics.