A phononic bandgap shield for high-Q membrane microresonators

2013/12/03 by P. -L. Yu, P.-L. Yu, K. Cicak +5 · 1 citation
Engineering · Physics and Astronomy · #Acoustic Wave Phenomena Research #Acoustic Wave Resonator Technologies #Band gap #Coupling (piping) #Mechanical and Optical Resonators #Membrane #Resonator #Shielded cable #Silicon #Silicon nitride #Wide-bandgap semiconductor #cond-mat.mes-hall

paper · pdf · doi:10.1063/1.4862031

published as Appl. Phys. Lett. 104, 023510 (2014) · 5 pages, 4 figures

arxiv created 2013/12/03 · openalex publication_date 2014/01/13 · arxiv updated 2015/06/18 · openalex created_date 2016/06/24 · openalex updated_date 2026/08/05

Abstract

A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside the observed bandgaps, the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB.

Citations

• Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane
• Sideband cooling of micromechanical motion to the quantum ground state
• Cavity Optomechanics with Stoichiometric SiN Films
• Quantum ground state and single-phonon control of a mechanical resonator

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