2012/09/21 by Michael R. Vissers, Jiansong Gao, Martin Sandberg +4 · 2 citations
Engineering · Physics and Astronomy · #Acoustic Wave Resonator Technologies #Detector #Kinetic energy #Kinetic inductance #Magnetic properties of thin films #Nanowire #Resonator #Stack (abstract data type) #Superconducting and THz Device Technology #Superconductivity #Superlattice #Tin #cond-mat.supr-con
paper · pdf · doi:10.1063/1.4804286
arxiv created 2012/09/21 · openalex publication_date 2013/06/10 · arxiv updated 2015/06/11 · openalex created_date 2016/06/24 · openalex updated_date 2026/08/05
We apply the superconducting proximity effect in TiN/Ti multi-layer films to tune the critical temperature, TC, to within 10 mK with high uniformity (less than 15 mK spread) across a 75 mm wafer. Reproducible TC’s are obtained from 0.8 to 2.5 K. These films had high resistivities, >100μΩ cm, and internal quality factors for resonators in the GHz range, on the order of 100 k and higher. Trilayers of both TiN/Ti/TiN and thicker superlattice films were prepared, demonstrating a well controlled process for films over a wide thickness range. Detectors were fabricated and shown to have single photon resolution at 1550 nm. The high uniformity and controllability coupled with the high quality factor, kinetic inductance, and inertness of TiN make these films ideal for use in frequency multiplexed kinetic inductance detectors and potentially other applications such as nanowire detectors, transition edge sensors, and associated quantum information applications.