1973/07/01 by T.L. Szabo, Thomas L. Szabo, A.J. Slobodnik · 169 citations
Engineering · Materials Science · Mathematics · #Acoustic Wave Resonator Technologies #Acoustics #Advanced MEMS and NEMS Technologies #Angular spectrum method #Anisotropy #Computational physics #Diffraction #Ferroelectric and Piezoelectric Materials #Geometry #Materials science #Mathematics #Optics #Physics #Surface (topology) #Surface acoustic wave #Surface wave
paper · doi:10.1109/t-su.1973.29751
published in IEEE Transactions on Sonics and Ultrasonics 20(3), 240-251 (Institute of Electrical and Electronics Engineers)
crossref issued 1973/07/01 · crossref published 1973/07/01 · crossref published-print 1973/07/01 · openalex publication_date 1973/07/01 · crossref created 2012/02/07 · crossref deposited 2021/11/29 · openalex created_date 2025/10/10 · crossref indexed 2026/08/01 · openalex updated_date 2026/08/01
A complete review of acoustic surface-wave dif- fraction on anisotropic substrates is presented. Full experi- mental verification of theory is provided. The limits of applicability of the parabolic velocity surface theory are quantitatively delineated. Universal diffraction loss design curves are given for all parabolic materials. A limitation in the use of the exact angular spectrum of waves theory occurs for materials having a power flow angle slope - I due to inaccu- rate knowledge of the velocity surface. Both YZ LiNbQ and 16.5 double rotated LiNb03 fall in this category. Approxi- mate diffraction loss design curves are given for YZ LiNb03. A complete tabular summary of all important material proper- ties affecting acoustic surface wave device design is included.