1996/01/01 by N. Lambert, E.A. Montie, T.S. Baller +5 · 3 citations
Engineering · Materials Science · #Electron and X-Ray Spectroscopy Techniques #Plasma Diagnostics and Applications #Semiconductor materials and devices
paper · doi:10.1016/s0165-5817(97)84677-3
crossref issued 1996/01/01 · crossref published 1996/01/01 · crossref published-print 1996/01/01 · openalex publication_date 1996/01/01 · crossref created 2002/07/25 · crossref deposited 2019/04/18 · crossref indexed 2022/04/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/06/26