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Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

2001/11/01 by A.R. Krauss, O. Auciello, Orlando Auciello +22 · 3 citations
Engineering · Materials Science · Physics and Astronomy · #Diamond and Carbon-based Materials Research #Force Microscopy Techniques and Applications #Metal and Thin Film Mechanics

paper · doi:10.1016/s0925-9635(01)00385-5

crossref issued 2001/11/01 · crossref published 2001/11/01 · crossref published-print 2001/11/01 · openalex publication_date 2001/11/01 · crossref created 2002/07/25 · crossref deposited 2019/04/24 · openalex created_date 2025/10/10 · crossref indexed 2026/05/18 · openalex updated_date 2026/08/03

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