Theoretical analysis of the electrode sheath in rf discharges

1989/02/01 by K.-U. Riemann, K.‐U. Riemann
Engineering · #Plasma Diagnostics and Applications #Electrohydrodynamics and Fluid Dynamics #Electrostatic Discharge in Electronics

paper · doi:10.1063/1.343003

Abstract

Starting from a previous kinetic theory of the plasma boundary layer (charge exchange model of the presheath), we investigate a collisionless planar electrode sheath of a capacitively coupled rf discharge in the frequency range between the ionic and electronic plasma frequencies (ωp+≪ω≪ωp−). The resulting model equations are evaluated in an approximation based on thick-sheath assumptions. We calculate the current-voltage characteristics of the sheath and analyze the voltage distribution in a two-electrode system.

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