Synthesis of Large-Area MoS2 Atomic Layers with Chemical Vapor Deposition

2012/02/24 by Yi-Hsien Lee, Xin-Quan Zhang, Wenjing Zhang +8 · 1 citation
Physics and Astronomy · #cond-mat.mtrl-sci

paper · pdf · doi:10.1002/adma.201104798

First submitted on 12-Dec-2011. Accepted in Adv. Mater

arxiv created 2012/02/24 · arxiv updated 2012/02/27

Abstract

Large-area MoS2 atomic layers are synthesized on SiO2 substrates by chemical vapor deposition using MoO3 and S powders as the reactants. Optical, microscopic and electrical measurements suggest that the synthetic process leads to the growth of MoS2 monolayer. The TEM images verify that the synthesized MoS2 sheets are highly crystalline.

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• Revealing the MoS2 Growth Mechanism in Chemical Vapor Deposition: Real-Time Imaging and Statistical Analysis

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