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Fabrication of submicron La2−xSrxCuO4 intrinsic Josephson junction stacks

2011/02/01 by Yuimaru Kubo, Yamaguchi Takahide, Takayoshi Tanaka +7
Engineering · Physics and Astronomy · #Advanced Electrical Measurement Techniques #Physics of Superconductivity and Magnetism #Quantum and electron transport phenomena #cond-mat.supr-con #quant-ph

paper · pdf · doi:10.1063/1.3544037

published as Journal of Applied Physics 109, 033912 (2011) · 5 pages, 6 figures

openalex publication_date 2011/02/01 · arxiv created 2011/08/17 · arxiv updated 2011/08/18 · openalex created_date 2016/06/24 · openalex updated_date 2026/07/30

Abstract

Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report success in fabricating submicron La2−xSrxCuO4 (LSCO) IJJ stacks carved out of single crystals. We also show a new fabrication method in which argon ion etching is performed after focused ion beam etching. As a result, we obtained an LSCO IJJ stack in which resistive multibranches appeared. It may be possible to control the number of stacked IJJs with an accuracy of a single IJJ by developing this method.

Citations