2006/07/31 by H. R. Boehm, H. R. Böhm, S. Gigan +10 · 2 citations
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #Geophysics and Sensor Technology #Mechanical and Optical Resonators #cond-mat.mtrl-sci
paper · pdf · doi:10.1063/1.2393000
published as Appl. Phys. Lett. 89, 223101 (2006) · 3 pages, 2 figures
openalex publication_date 2006/11/27 · arxiv created 2007/01/02 · arxiv updated 2009/12/01 · openalex created_date 2016/06/24 · openalex updated_date 2026/07/28
The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400ng, and a mechanical quality factor Q of approximately 104. Using this micromirror in a Fabry-Pérot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high-Q high-finesse cavities on chip.