2003/09/16 by K. L. Ekinci, Y. T. Yang, M. L. Roukes · 8 citations
Materials Science · Physics and Astronomy · #Force Microscopy Techniques and Applications #Inertial frame of reference #Mechanical and Optical Resonators #Nanoelectromechanical systems #Noise (video) #Nonlocal and gradient elasticity in micro/nano structures #Range (aeronautics) #Resolution (logic) #Resonance (particle physics) #Resonator #Sensitivity (control systems) #physics.bio-ph #physics.ins-det
paper · pdf · doi:10.1063/1.1642738
preprint, subm. to J. Appl. Phys. - 32 pages, 6 figures, 2 tables
arxiv created 2003/09/16 · openalex publication_date 2004/02/13 · arxiv updated 2009/12/01 · openalex created_date 2016/06/24 · openalex updated_date 2026/08/05
Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors (Q) in the range 103⩽Q⩽105. The minuscule active masses of these devices, in conjunction with their high Qs, translate into unprecedented inertial mass sensitivities. This makes them natural candidates for a variety of mass sensing applications. Here we evaluate the ultimate mass sensitivity limits for nanomechanical resonators operating in vacuo that are imposed by a number of fundamental physical noise processes. Our analyses indicate that nanomechanical resonators offer immense potential for mass sensing—ultimately with resolution at the level of individual molecules.