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Laser ablation of Co:ZnO films deposited from Zn and Co metal targets on (0001) Al2O3 substrates

2003/04/10 by W. Prellier, A. Fouchet, B. Mercey +2 · 2 citations
Materials Science · Physics and Astronomy · #Copper-based nanomaterials and applications #Electronic and Structural Properties of Oxides #ZnO doping and properties #cond-mat.mtrl-sci #cond-mat.str-el

paper · pdf · doi:10.1063/1.1578183

published as Appl. Phys. Lett. 82 (2003) 3490 · 8 pages, 5 Figures, accepted in Applied Physics Letters

arxiv created 2003/04/10 · openalex publication_date 2003/05/15 · arxiv updated 2009/11/30 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

We report on the synthesis of high-quality Co-doped ZnO thin films using the pulsed laser deposition technique on (0001)-Al2O3 substrates performed in an oxidizing atmosphere, using Zn and Co metallic targets. We first optimized the growth of ZnO in order to obtain the less strained film. Highly crystallized Co:ZnO thin films are obtained by an alternative deposition from Zn and Co metal targets. This procedure allows an homogenous repartition of the Co in the ZnO wurzite structure which is confirmed by the linear dependence of the out-of-plane lattice parameter as a function of the Co dopant. In the case of 5% Co doped, the film exhibits ferromagnetism with a Curie temperature close to the room temperature.

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