Thermoelastic damping in micro- and nanomechanical systems

1999/09/17 by Ron Lifshitz, M. L. Roukes · 9 citations
Engineering · Materials Science · Physics and Astronomy · #Atomic force microscopy #Elasticity and Wave Propagation #Materials science #Mechanics #Nanomechanics #Nanotechnology #Nonlocal and gradient elasticity in micro/nano structures #Physics #Thermal #Thermodynamics #Thermoelastic and Magnetoelastic Phenomena #Thermoelastic damping #cond-mat.mes-hall

paper · pdf · doi:10.1103/physrevb.61.5600

published as Phys. Rev. B 61, 5600 (2000). · 10 pages. Submitted to Phys. Rev. B

arxiv created 1999/09/17 · openalex publication_date 2000/02/15 · arxiv updated 2009/11/30 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/05

Abstract

The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometer- and nanometer-scale electromechanical systems. The equations of linear thermoelasticity are used to give a simple derivation for thermoelastic damping of small flexural vibrations in thin beams. It is shown that Zener's well-known approximation by a Lorentzian with a single thermal relaxation time slightly deviates from the exact expression.

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