2005/01/01 by David Echeverría, Piet Hemker · 1 citation
Engineering · #Advancements in Photolithography Techniques #Integrated Circuits and Semiconductor Failure Analysis #Semiconductor materials and devices
paper · pdf · doi:10.2478/cmam-2005-0006
openalex publication_date 2005/01/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/01
Abstract In this paper we show that space-mapping optimization can be understood in the framework of defect correction. Then, space-mapping algorithms can be seen as special cases of defect correction iteration. In order to analyze the properties of space mapping and the space-mapping function, we introduce the new concept of flexibility of the underlying models. The best space-mapping results are obtained for so-called equally flexible models. By introducing an a±ne operator as a left preconditioner, two models can be made equally flexible, at least in the neighborhood of a solution. This motivates an improved space-mapping (or manifold-mapping) algorithm. The left preconditioner complements traditional space mapping where only a right preconditioner is used. In the last section a few simple examples illustrate some of the phenomena analyzed in this paper.