2008/09/22 by K. Lai, W. Kundhikanjana, M. A. Kelly +1
Engineering · Physics and Astronomy · #Microwave Imaging and Scattering Analysis #Microwave and Dielectric Measurement Techniques #Near-Field Optical Microscopy #cond-mat.mtrl-sci
paper · pdf · doi:10.1063/1.2990638
published as Appl. Phys. Lett. 93, 123105 (2008) · 10 pages, 3 figures
openalex publication_date 2008/09/22 · arxiv created 2008/09/24 · arxiv updated 2009/12/01 · openalex created_date 2016/06/24 · openalex updated_date 2026/07/28
A stripline-type near-field microwave probe is microfabricated for microwave impedance microscopy. Unlike the poorly shielded coplanar probe that senses the sample tens of microns away, the stripline structure removes the stray fields from the cantilever body and localizes the interaction only around the focused-ion beam deposited Pt tip. The approaching curve of an oscillating tip toward bulk dielectrics can be quantitatively simulated and fitted to the finite-element analysis result. The peak signal of the approaching curve is a measure of the sample dielectric constant and can be used to study unknown bulk materials.