2008/02/29 by Garrett D. Cole, Simon Gröblacher, Simon Groeblacher +3
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #Force Microscopy Techniques and Applications #Mechanical and Optical Resonators #cond-mat.mes-hall #physics.optics #quant-ph
paper · pdf · doi:10.1063/1.2952512
published as Appl. Phys. Lett. 92, 261108 (2008) · 5 pages, 2 figures
openalex publication_date 2008/06/30 · arxiv created 2008/09/18 · arxiv updated 2009/12/01 · openalex created_date 2016/06/24 · openalex updated_date 2026/07/31
We present high-performance megahertz micromechanical oscillators based on freestanding epitaxial AlxGa1−xAs distributed Bragg reflectors. Compared with dielectric reflectors, the low mechanical loss of the monocrystalline heterostructure gives rise to significant improvements in the achievable mechanical quality factor Q while simultaneously exhibiting near unity reflectivity. Experimental characterization yields an optical reflectivity exceeding 99.98% and mechanical quality factors up to 20 000 at 4K. This materials system is not only an interesting candidate for optical coatings with ultralow thermal noise, but also provides a promising path toward quantum optical control of massive micromechanical mirrors.