2004/11/18 by F. Lacour, N. Courjal, Nadège Courjal +6 · 1 citation
Engineering · Physics and Astronomy · #Photonic Crystals and Applications #Photonic and Optical Devices #Photorefractive and Nonlinear Optics #physics.optics
paper · pdf · doi:10.1016/j.optmat.2004.07.016
published as Optical Materials 27 (2005) 1421-1425
openalex publication_date 2004/11/18 · arxiv created 2008/01/28 · arxiv updated 2009/12/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/29
We report on two novel ways for patterning Lithium Niobate (LN) at submicronic scale by means of focused ion beam (FIB) bombardment. The first method consists of direct FIB milling on LiNbO3 and the second one is a combination of FIB milling on a deposited metallic layer and subsequent RIE (Reactive Ion Etching) etching. FIB images show in both cases homogeneous structures with well reproduced periodicity. These methods open the way to the fabrication of photonic crystals on LiNbO3 substrates.