2000/12/04 by Philip Henderson, Andrew J. Woytek · 2 citations
Chemistry · #Inorganic Fluorides and Related Compounds
paper · doi:10.1002/0471238961.1409201808051404.a01
openalex publication_date 2000/12/04 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/14
Abstract Nitrogen has four binary fluorides: nitrogen trifluoride, tetrafluorohydrazine, difluorodiazine, and fluorine azide. There are numerous other nitrogen fluorine compounds, the most significant of which are the perfluoroammonium salts based on the NF + 4 cation. Of all the nitrogen fluorine compounds, only NF 3 has been of commercial importance. Nitrogen trifluoride is used as an etchant gas in the electronic industry and as a fluorine source in high power chemical lasers.