2026/07/31 by Zhongpeng Sun, Kerolos M. A. Yousef, Michael Domm +13
Physics and Astronomy · #physics.optics #cond-mat.mtrl-sci
21 pages, 4 figures, 1 table. Supplementary Information: 27 pages, 11 figures, 7 supplementary notes
arxiv created 2026/07/31 · arxiv updated 2026/08/04
Free-space electro-optic modulators are key to emerging photonic systems, yet their performance remains limited by trade-offs between modulation efficiency, bandwidth, and device aperture. Here we report a hybrid BaTiO3 (BTO)/TiO2 metasurface for large-aperture, efficient, gigahertz-speed free-space electro-optic modulation. Combining scalable BTO film growth by radio-frequency magnetron sputtering with mature TiO2 nanofabrication, we pattern the metasurface in TiO2 on an unetched BTO layer. The resulting devices support guided-mode resonances with quality factors exceeding 1300 and an optical confinement factor of ~0.8, while the continuous BTO layer makes efficient use of the applied voltage, together maximizing the overlap between the optical and driving fields within the BTO. A device with a 0.3 mm x 0.3 mm metasurface achieves a transmittance modulation efficiency of ~0.020 per volt and a -3 dB electro-optic bandwidth of ~0.8 GHz, with an effective Pockels coefficient of ~151 pm/V for the BTO. This establishes a scalable route to high-performance free-space electro-optic modulators for LiDAR, free-space optical communication, and reconfigurable optical computing.