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Silicon nanocrystal synthesis with the atmospheric plasma source HelixJet

2022/10/31 by Maren Dworschak, Niklas Kohlmann, F. Matějka +4 · 1 voice
Materials Science · Engineering · #Silicon Nanostructures and Photoluminescence #Carbon and Quantum Dots Applications #Nanowire Synthesis and Applications

paper · pdf · doi:10.1002/ppap.202200129

openalex publication_date 2022/10/31 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/01

Abstract

Abstract The HelixJet, a plasma source operating under atmospheric pressure with RF power, was used for the synthesis of silicon nanoparticles (Si‐NPs) in the context of relevance in nanomedicine, sensor technology, and nanotechnology. The HelixJet was operated with a variety of He/Ar/H 2 /SiH 4 gas mixtures to characterize the Si‐NPs in regard to their size, crystallinity, structure, and photoluminescence. Distinct varieties of nanomaterials in the size range from 3 nm to over 100 nm were synthesized depending on the operation parameters of the HelixJet. Admixture of H 2 alongside high RF powers led to the formation of crystalline nanoparticles with a strong photoluminescence intensity, where the photoluminescence properties as well as the nanocrystal synthesis yield were tunable by adjustment of the synthesis parameters. Post‐synthesis in‐flight annealing allowed the formation of large crystalline nanoparticles. In addition, the experiments conducted in this study resulted in a design improvement of the HelixJet plasma source that extends the stability of the operating range. Furthermore, the added spatial separation of the He/H 2 and He/Ar/SiH 4 streams (SiH 4 injection on‐axis) minimizes material deposition within the HelixJet and enables continuous long‐term operation.

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