2011/11/17 by Giovanni Betti Beneventi, L. Perniola, Luca Perniola +8
Materials Science · Engineering · #Phase-change materials and chalcogenides #Chalcogenide Semiconductor Thin Films #Transition Metal Oxide Nanomaterials
paper · doi:10.1109/ted.2011.2170840
The physical mechanisms that regulate carrier transport in polycrystalline chalcogenides, such as <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">\hboxGe2\hboxSb2\hboxTe5</tex></formula> (GST), are still debated. Recently, self-induced Joule-heating (SJH) effect has been claimed to be the key factor in explaining the nonlinearity of the <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">I</tex></formula> – <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX"> V</tex></formula> characteristics of polycrystalline GST-based phase-change memory (PCM). In this paper, we carefully investigate the SJH occurring in the GST material by analyzing the <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">I </tex></formula> – <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">V</tex></formula> characteristics of PCM cells at low voltages, i.e., in the memory-cell readout region. To accomplish the study, we use ad hoc fabricated PCM devices allowing an easier evaluation of SJH occurring in the chalcogenide layer. A novel procedure to test the SJH effect is also proposed. A comparison between numerical simulations and compact modeling is discussed as well. Our paper shows that the SJH effect is not sufficient to reproduce the experimental <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">I </tex></formula> – <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">V</tex></formula> nonlinearity, claiming for new experiments and theoretical investigations. Therefore, this paper can be considered a step forward toward the comprehension of the transport properties of polycrystalline GST, which is a key aspect for robust modeling of PCM devices.