Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays

2025/01/01 by Leonhard M. Lohr, Richard Ciesielski, Vinh‐Binh Truong +1 · 1 voice
Materials Science · Engineering · Physics and Astronomy · #Optical Coatings and Gratings #Near-Field Optical Microscopy #Advanced X-ray Imaging Techniques

paper · pdf · doi:10.1039/d4nr04580g

openalex publication_date 2025/01/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/06/12

Abstract

soft X-ray fluorescence analysis in a hybrid measurement approach can help resolve ambiguous scatterometry results and reduce uncertainty. In this work, the hybrid approach is used to compare solutions from the dimensional reconstruction and determine the actual solution over ambiguous ones.

Citations

• Analysis of a complex of statistical variables into principal components.
• Surface Studies of Solids by Total Reflection of X-Rays
• Rigorous coupled-wave analysis of planar-grating diffraction
• Least squares quantization in PCM
• SciPy 1.0--Fundamental Algorithms for Scientific Computing in Python

Discussions

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