3.2-MP Back-Illuminated Polarization Image Sensor With Four-Directional Air-Gap Wire Grid and 2.5-<inline-formula> <tex-math notation="LaTeX">μ </tex-math> </inline-formula>m Pixels

2018/05/04 by Yasushi Maruyama, Takashi Terada, Tomohiro Yamazaki +16 · 15 citations
Engineering · Computer Science · #Optical Polarization and Ellipsometry #CCD and CMOS Imaging Sensors #Optical measurement and interference techniques

paper · doi:10.1109/ted.2018.2829190

Abstract

A 3.2-MP four-directional polarization image sensor with air-gap wire-grid polarizer is described. The image sensor was fabricated using a wafer process and incorporates back-illumination and an antireflection layer to minimize optical flaring and ghosting problems. In testing, the sensor achieved a polarization transmittance of 63.3% and an extinction ratio of 85 at 550 nm, thereby outperforming conventional polarization sensors. The proposed sensor also exhibited good oblique-incidence characteristics, even with small polarization pixels of 2.5 μm. Based on these results, the proposed image sensor is suitable for various megapixel fusion-imaging applications, such as reducing surface reflections, highly accurate depth mapping, and condition-robust surveillance.

Cited by

• PolarGS: Polarimetric Cues for Ambiguity-Free Gaussian Splatting with Accurate Geometry Recovery
• Polarization Denoising and Demosaicking: Dataset and Baseline Method
• Fabry-Perot cavity resonance enabling highly polarization-sensitive double-layer gold grating. [europepmc]
• Survey of Demosaicking Methods for Polarization Filter Array Images. [europepmc]
• Video-rate quantitative phase analysis by a DIC microscope using a polarization camera. [europepmc]
• Minimizing scattering-induced phase errors in differential interference contrast microscopy. [europepmc]
• Polarization-probe polarization-imaging system in near-infrared regime using a polarization grating. [europepmc]
• Exposure Time Control Method for Higher Intermediate Frequency in Optical Heterodyne Imaging and Its Application to Electric-Field Imaging Based on Electro-Optic Effect. [europepmc]
• Millimeter-Wave Band Electro-Optical Imaging System Using Polarization CMOS Image Sensor and Amplified Optical Local Oscillator Source. [europepmc]
• Single-shot incoherent digital holography based on generalised three-step phase-shifting method with 1D phase grating. [europepmc]
• Enhancing Image Reconstruction Method in High-Frequency Electric Field Visualization Systems Using a Polarized Light Image Sensor. [europepmc]
• The Structural Types of the Polarization Detection Unit in Imaging Polarimeter Based on the Stokes Parameter Method. [europepmc]
• Integrated Polarimetric Spectral Imaging Sensor Combining Spectral Imaging and Polarization Modulation Techniques. [europepmc]
• Polarization Photovoltage Transistor enabling Amplified Responsivity and Sensitivity. [europepmc]
• Method of Directly Writing MPA on Photosensitive Surface of Detector Based on FIB [europepmc]

Related

• Polarization Analyzing Image Sensor with On-Chip Metal Wire Grid Polarizer in 65-nm Standard Complementary Metal Oxide Semiconductor Process
• Polarization Analyzing Image Sensor with On-Chip Metal Wire Grid Polarizer in 65-nm Standard Complementary Metal Oxide Semiconductor Process
• Sub-percent Characterization and Polarimetric Performance Analysis of Commercial Micro-polarizer Array Detectors
• Simultaneous Acquisition of High Quality RGB Image and Polarization Information using a Sparse Polarization Sensor
• Stacked polarimeters with twisted black phosphorus