2025/01/01 by Michael G. Ruppert, Miguel Wiche, André Schirmeisen +1 · 1 voice
Physics and Astronomy · Engineering · #Force Microscopy Techniques and Applications #Mechanical and Optical Resonators #Advanced MEMS and NEMS Technologies
paper · doi:10.1039/d4nr04169k
openalex publication_date 2025/01/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/01
factor, qPlus sensors are pre-dominantly used for obtaining atomic resolution. In this work, we present a proof of concept for an active microelectromechanical system (MEMS) microcantilever with integrated piezoelectric sensing and demonstrate its capability to obtain scanning tunneling microscopy as well as high-resolution non-contact atomic force microscopy images on an atomically flat Au(111) surface. Equipped with a focused ion beam deposited tungsten tip, the active MEMS cantilever is able to obtain high contrast scanning tunneling and frequency shift images at the fundamental and at a higher eigenmode of the cantilever.