An Integrated-Circuit Approach to Extracellular Microelectrodes

1970/07/01 by Kensall D. Wise, James B. Angell, Arnold Starr · 27 citations
Chemical Engineering · Chemistry · Engineering · Neuroscience · #Analytical Chemistry and Sensors #Chemistry #Electrochemical Analysis and Applications #Electrode #Electrode array #Electronic engineering #Engineering #Fabrication #Integrated circuit #Layer (electronics) #Materials science #Microelectrode #Microprobe #Multielectrode array #Nanotechnology #Neuroscience and Neural Engineering #Optoelectronics #Silicon #Silicon dioxide

paper · doi:10.1109/tbme.1970.4502738

openalex publication_date 1970/07/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/23

Abstract

This paper describes a new multielectrode microprobe which utilizes integrated-circuit fabrication techniques to overcome many of the problems associated with conventional microelectrodes. The probe structure consists of an array of gold electrodes which are supported on a silicon carrier and which project beyond the carrier for a distance of about 50 μ to allow a close approach to active neurons. These electrodes are covered with a thin (0.4-μ) layer of silicon dioxide which is selectively removed at the electrode tips using high-resolution photoengraving techniques to define the recording areas precisely. The processing sequence described permits any two-dimensional electrode array to be realized. Interelectrode spacings can be accurately controlled in the range from 10 to 20 μ or larger, and electrode-tip diameters can be as small as 2 μ.

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