Essential principles and practices in x-ray photoelectron spectroscopy

2025/12/31 by Jan Čechal · 1 voice
Biochemistry, Genetics and Molecular Biology · Materials Science · Physics and Astronomy · #Advanced Electron Microscopy Techniques and Applications #Electron and X-Ray Spectroscopy Techniques #X-ray Spectroscopy and Fluorescence Analysis

paper · doi:10.1116/6.0005469

openalex publication_date 2026/06/01 · openalex created_date 2026/06/02 · openalex updated_date 2026/07/28

Abstract

X-ray photoelectron spectroscopy (XPS) is a widely used technique for the chemical analysis of solid surfaces, sensitive to the chemical environments of atoms via core-level binding energy shifts. While modern instruments allow experimental data to be acquired with ease, their evaluation and interpretation remain challenging for newcomers to the field, as a profound knowledge of the method is required for correct analysis. Here, we present a concise yet comprehensive overview of the fundamental principles and methodologies of XPS, covering photoemission processes, chemical shifts, charge referencing, peak fitting, and quantification strategies. This overview aims to bridge the gap between data collection and reliable analysis, providing essential knowledge for correct interpretation. By clarifying key concepts and common practices, this work supports improved accuracy in surface chemical characterization using XPS.

Citations

• Natural widths of atomic K and L levels, Kα X-ray lines and several K L L Auger lines
• On the wrong assignment of the XPS O1s signal at 531–532 eV attributed to oxygen vacancies in photo- and electro-catalysts for water splitting and other materials applications
• Revisiting the assignment of atomic charges in metal oxides based on core-level x-ray photoelectron spectra: The case of Ti in SrTiO3(001)
• Decoding Shake-up Satellites in XPS through Large-Scale ab initio Simulations: Spectral Signatures of Ring Fusion in Porphyrins

Discussions

• You've collected the spectrum—now what? Here is your practical guide to making sense of XPS from @ceitec.eu. doi.org/10.1116/6.00... [bsky, 0 points, 0 comments]

Related

• X-ray photoelectron spectroscopy: Towards reliable binding energy referencing
• Toward reliable x-ray photoelectron spectroscopy: Understanding fundamental differences between analyses performed on samples with and without electrical contact to spectrometer
• Systematic and collaborative approach to problem solving using X-ray photoelectron spectroscopy
• Effect of UV light irradiation on charge neutralization in XPS measurements
• Toward the Origins of Binding Energy Shifts and Satellites Formation During Plasma-XPS Measurements