2024/11/12 by V. S. Santosh K. Kondeti, Shurik Yatom, Ivan Romadanov +3 · 1 voice
Engineering · Medicine · #Laser Design and Applications #Laser-induced spectroscopy and plasma #Plasma Applications and Diagnostics
paper · doi:10.1116/6.0004070
openalex publication_date 2024/11/12 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/01
A wide variety of feed gases are used to generate low-temperature plasmas for the microelectronics and sustainability applications. These plasmas often have a complex combination of reactive and nonreactive species which may have spatial and temporal variations in density, temperature, and energy. Accurate knowledge of these parameters and their variations is critically important for understanding and advancing these applications through validated and predictive modeling and the design of relevant devices. Laser-induced fluorescence (LIF) provides both spatial and temporally resolved information about the plasma-produced radicals, ions, and metastables. However, the use of this powerful diagnostic tool requires the knowledge of optical transitions including excitation and fluorescence wavelengths which may not be available or scattered through a huge literature domain. In this paper, we collected, analyzed, and compiled the available transitions for laser-induced fluorescence for more than 160 chemical species relevant to the microelectronics industry and the sustainability applications. A list of species with overlapping LIF excitations and fluorescence wavelengths have been identified. This summary is intended to serve as a data reference for LIF transitions and should be updated in the future.