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Silane production from the dichlorosilane by-product of the Siemens process: a comparative study with the trichlorosilane route

2025/01/01 by Zi-Yi Chi, P.K. Bai, Wen‐De Xiao +2 · 1 voice
Engineering · #Advanced Battery Materials and Technologies #Advancements in Battery Materials #Extraction and Separation Processes

paper · pdf · doi:10.1039/d5im00040h

openalex publication_date 2025/01/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/30

Abstract

The DCS-based silane production process exhibits higher reaction efficiency and lower energy consumption compared to the conventional TCS route, while enabling seamless integration with the Siemens process for polysilicon production.

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