From egg-shell to uniform distribution of platinum by atomic layer deposition on mesoporous alumina spheres: experiments and modeling

2026/01/01 by Christine Gonsalves, Jänis Järvilehto, Saeed Saedy +7 · 1 voice
Engineering · Materials Science · #Copper Interconnects and Reliability #Nanoporous metals and alloys #Semiconductor materials and devices

paper · pdf · doi:10.1039/d5lf00395d

openalex publication_date 2026/01/01 · openalex created_date 2026/04/02 · openalex updated_date 2026/08/01

Abstract

Fluidized-bed atmospheric-pressure ALD achieves uniform distribution of Pt in high-aspect-ratio mesoporous spheres, supported by diffusion–reaction modelling.

Discussions

• New paper out! Platinum #ALDep egg-shell and uniform distribution coatings through millimeter-sized mesoporous alumina particles. Gonsalves et al., collaboration of @aalto.fi with @jrvo.bsky.social gr [bsky, 2 points, 0 comments]

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