1978/05/01 by Doreen Mehs, Thomas M. Niemczyk
Engineering · Medicine · #Metal and Thin Film Mechanics #Plasma Applications and Diagnostics #Plasma Diagnostics and Applications
paper · doi:10.1366/000370278774331297
openalex publication_date 1978/05/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/06/26
A system has been designed which will rapidly and conveniently measure the electron temperature in a hollow cathode discharge. The measurement system is based on the floating double probe technique. Preliminary results obtained with this system indicate that the electron temperature depends on lamp current, fill gas pressure, and cathode material. These results are compared to those found in the literature for low pressure, microwave, and radiofrequency discharges. The electron temperatures measured in the three types of discharges have similar values, but the different discharges show strikingly different dependences on plasma composition.