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制限反応スパッタ法によるゲート絶縁膜用ZrO2薄膜のアニール効果の検討(薄膜プロセス・材料,一般)

2009/10/22 by Jinglin Jiang, Xiaosu Ding, Satya S. Patra +12 · 1 voice
Chemical Engineering · Environmental Science · Medicine · #Indoor Air Quality and Microbial Exposure #Occupational exposure and asthma #Odor and Emission Control Technologies

paper · pdf · doi:10.1021/acs.est.3c05156

openalex publication_date 2009/10/22 · openalex created_date 2016/06/24 · openalex updated_date 2026/06/24

Abstract

Cyclic volatile methyl siloxanes (cVMS) are ubiquitous in hair care products (HCPs). cVMS emissions from HCPs are of concern, given the potential adverse impact of siloxanes on the environment and human health. To characterize cVMS emissions and exposures during the use of HCPs, realistic hair care experiments were conducted in a residential building. Siloxane-based HCPs were tested using common hair styling techniques, including straightening, curling, waving, and oiling. VOC concentrations were measured via proton-transfer-reaction time-of-flight mass spectrometry. HCP use drove rapid changes in the chemical composition of the indoor atmosphere. cVMS dominated VOC emissions from HCP use, and decamethylcyclopentasiloxane (D5) contributed the most to cVMS emissions. cVMS emission factors (EFs) during hair care routines ranged from 110-1500 mg/person and were influenced by HCP type, styling tools, operation temperatures, and hair length. The high temperature of styling tools and the high surface area of hair enhanced VOC emissions. Increasing the hair straightener temperature from room temperature to 210 °C increased cVMS EFs by 50-310%. Elevated indoor cVMS concentrations can result in substantial indoor-to-outdoor transport of cVMS via ventilation (0.4-6 tons D5/year in the U.S.); thus, hair care routines may augment the abundance of cVMS in the outdoor atmosphere.

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