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Rayleigh scattering, mode coupling, and optical loss in silicon microdisks

2004/06/24 by Matthew Borselli, Kartik Srinivasan, Paul E. Barclay +1 · 1 citation
Engineering · Physics and Astronomy · #Advanced Fiber Laser Technologies #Photonic Crystals and Applications #Photonic and Optical Devices #physics.optics

paper · pdf · doi:10.1063/1.1811378

published as App. Phys. Lett., v85(17), pp. 3693-3695, Oct. 25, 2004 · 4 pages, 2 figures; contains minor correction to doublet splitting theory

arxiv created 2004/06/24 · openalex publication_date 2004/10/25 · arxiv updated 2009/12/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

High refractive index contrast optical microdisk resonators fabricated from silicon-on-insulator wafers are studied using an external silica fiber taper waveguide as a wafer-scale optical probe. Measurements performed in the 1500nm wavelength band show that these silicon microdisks can support whispering-gallery modes with quality factors as high as 5.2×105, limited by Rayleigh scattering from fabrication induced surface roughness. Microdisks with radii as small as 2.5μm are studied, with measured quality factors as high as 4.7×105 for an optical mode volume of 5.3(λ∕n)3.

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