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Fabrication and Characterization of Active-Matrix 960×540 Blue GaN-Based Micro-LED Display

2019/02/21 by Chien-Ju Chen, Hongchun Chen, Hong-Chun Chen +4 · 5 citations
Physics and Astronomy · Engineering · #GaN-based semiconductor devices and materials #Organic Light-Emitting Diodes Research #Advanced Sensor and Energy Harvesting Materials

paper · doi:10.1109/jqe.2019.2900540

Abstract

In this paper, we demonstrate a high-resolution <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">960× 540 </tex-math></inline-formula> blue-emitting active matrix micro-display. The blue micro-display have a diagonal length of 0.55 inch, a pixel size of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">8~μ m </tex-math></inline-formula> with a pixel pitch of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">12.8~μ m </tex-math></inline-formula> , and high pixel density of 2000 pixels per inch. The single pixel of micro-display exhibits excellent characteristics including an extremely low-leakage current of 0.1 pA at −5 V, a low forward voltage of 2.73 V, a narrow full width at half maximum of 15.7 nm of electroluminescence spectra, a high external quantum efficiency of 13.3%, and a deep-blue emission with CIE coordinates of (0.1589, 0.0542) at <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">11~μ A </tex-math></inline-formula> . Besides, the single pixel of micro-LED also shows high brightness of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">4.2 × 106 </tex-math></inline-formula> and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">7.4 × 106 </tex-math></inline-formula> cd/m <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> at <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">500~μ A </tex-math></inline-formula> and 1 mA, respectively. The complete <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">960× 540 </tex-math></inline-formula> micro-display has a contrast ratio of 3600000:1, the power consumption with all on is 0.5 W, and the pixel yield rate of about 98.674% analyzed by the software ImageJ.

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