1989/11/01 by K. A. Valiev, L. V. Velikov, G. S. Volkov +3
Engineering · #Advancements in Photolithography Techniques #Laser Design and Applications #Laser Material Processing Techniques
paper · doi:10.1116/1.584501
openalex publication_date 1989/11/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/30
The spatial coherence of the excimer laser radiation seriously affects the quality of the images being reproduced by diffraction limited optics in photolithography. It is shown that the coherence parameters of excimer laser radiation exceed the necessary level in 102–103 times. To decrease the coherence down to the optimal level a fly’s eye element is used. The concept of Kirchhoff integrals has been applied to calculate the mutual intensity function transformation by the illuminator of the projection system equipped with fly’s eye element.