Wet etching of GaN, AlN, and SiC: a review

2005/01/01 by D. Zhuang, J.H. Edgar · 2 citations

paper · doi:10.1016/j.mser.2004.11.002

Cited by

• Investigation of Phase Segregation in Highly Doped InP by Selective Electrochemical Etching
• Neural Network-Driven Molecular Insights into Alkaline Wet Etching of GaN: Toward Atomistic Precision in Nanostructure Fabrication