XPS study of amorphous carbon nitride (a-C:N) thin films deposited by reactive RF sputtering

2005/12/02 by E. Ech-chamikh, E. Ech‐chamikh, A. Essafti +2
Engineering · Materials Science · #Diamond and Carbon-based Materials Research #Metal and Thin Film Mechanics #Semiconductor materials and devices

paper · doi:10.1016/j.solmat.2005.10.007

openalex publication_date 2005/12/02 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/29

Citations

• Study of CN binding states in carbon nitride films deposited by reactive XeCl laser ablation