2023/05/03 by Xiaodong Chen, Zhimin Xie, Renhao Shen +3
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #Force Microscopy Techniques and Applications #Piezoelectric Actuators and Control
paper · doi:10.1016/j.sna.2023.114402
openalex publication_date 2023/05/03 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/30