Electron backscattering coefficient, material contrast and response function of BSE- detectors in scanning electron microscopy

2025/06/11 by E.I. Rau, Э. И. Рау, S.V. Zaitsev
Engineering · Materials Science · Physics and Astronomy · #Advancements in Photolithography Techniques #Electron and X-Ray Spectroscopy Techniques #X-ray Spectroscopy and Fluorescence Analysis

paper · doi:10.1016/j.ultramic.2025.114196

openalex publication_date 2025/06/11 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Citations

• Quantitative analysis of backscattered‐electron contrast in scanning electron microscopy