Analysis of Kikuchi band contrast reversal in electron backscatter diffraction patterns of silicon

2009/11/25 by Aimo Winkelmann, Gert Nolze
Materials Science · Engineering · #Electron and X-Ray Spectroscopy Techniques #Integrated Circuits and Semiconductor Failure Analysis #Non-Destructive Testing Techniques

paper · doi:10.1016/j.ultramic.2009.11.008

Citations

• Progressive steps in the development of electron backscatter diffraction and orientation imaging microscopy