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Orientation mapping by transmission-SEM with an on-axis detector

2015/11/10 by J.J. Fundenberger, Emmanuel Bouzy, E. Bouzy +8 · 3 citations
Materials Science · Biochemistry, Genetics and Molecular Biology · Engineering · #Electron and X-Ray Spectroscopy Techniques #Advanced Electron Microscopy Techniques and Applications #Advancements in Photolithography Techniques

paper · doi:10.1016/j.ultramic.2015.11.002

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