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Scattering delocalization and radiation damage in STEM-EELS

2017/04/01 by R.F. Egerton · 3 citations
Engineering · Materials Science · #Advancements in Photolithography Techniques #Electron and X-Ray Spectroscopy Techniques #Integrated Circuits and Semiconductor Failure Analysis

paper · doi:10.1016/j.ultramic.2017.02.007

openalex publication_date 2017/04/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/29

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